Each Tutorial consists of 2 parts. First (main) part consists of using already created geometry to set-up
and run plasma model. All prep files are available from cfdrc.com   software/tutorials/plasma  ftp
account.  Second part /results contain all case files (already run by cfdrc engineers). You can compare
your setup with this one, check to convergence history and other parameters to make sure that you
have not made a mistake in process.  And when you will make them, then "results directory" will prove
to be very useful for you.

To download tutorial datasets please FTP to cfdrc.com software ftp site:

ftp ftp.cfdrc.com
login: software
password: ASK US FOR the password

EMAIL TO  [email protected]  or [email protected]   )

Go to the correct location;
cd /pub/tutorials/plasma

Get the tutorial files and the codes for your system. From the following subdirectories:

/pub/tutorials/plasma/codes
/pub/tutorials/plasma/tutorial1
/tutorial2
/tutorialxx

  Tutorial 0 [Unstructured Grid Generation]

Tutorial 1 [Plasma Source, no flow]

Tutorial 2 [Simple SiH4/O2 CVD, flow]

Tutorial 3 [Cl Etch Plasma]

Slide1  Slide2    Slide3   Slide4   Slide5  Slide6  Slide7    Slide8  Slide9

Tutorial 4

Tutorial 5 [Plasma Source, no Flow, RF/DC Bias, Poisson Equation]