Descriptions of Demonstration/Test Problems

ftp ftp.cfdrc.com
login: software
password: ASK US FOR the password (EMAIL TO  [email protected]  or [email protected]   )

Go to the correct location;
cd /pub/tutorials/plasma/demos

Get the demo files.

• CF4 Etch                    

• C2F6 Etch

• O2 Plasma

• Cl Etch

• ESC Bipolar Chuck and Wafer Deformation

• SiH4/O2/Ar HDP CVD

• Osram Sylvania 10mtorr and 100 mtorr Ar plasma

• 1torr plasma

• Virtual Reactor Geometry 2D and 3D (Ar plasma)